{"product_id":"9781107408326","title":"Cmos Gate-Stack Scaling ? Materials, Interfaces And Reliability Implications: Volume 1155 (Mrs Proceedings)","description":"To address the increasing demands of device scaling, new materials are being introduced into conventional Si CMOS processing at an unprecedented rate. Presentations collected here focus on understanding, from a chemistry and materials perspective, the mechanism of interface formation and defects at interfaces, for both conventional Si and alternative channel (Ge or III-V) systems. Several papers address reliability concerns for high-k\/metal gate (basic physical models, charge trapping, etc.), while others cover characterization of the thin films and interfaces which comprise the gate stack. Topics include: advanced Si-based gate stacks; and alternate channel materials.\u003cbr\u003e\u003cbr\u003e\u003cbr\u003e\u003cul\u003e\n\u003cli\u003e• \u003cb\u003eAuthor: \u003c\/b\u003eAlexander A. Demkov, Bill Taylor, H. Rusty Harris, Jeffery W. Butterbaugh, Willy Rachmady\u003c\/li\u003e\n\u003cli\u003e• \u003cb\u003ePublisher: \u003c\/b\u003eCambridge University Press\u003c\/li\u003e\n\u003cli\u003e• \u003cb\u003ePublication Date: \u003c\/b\u003eJun 05, 2014\u003c\/li\u003e\n\u003cli\u003e• \u003cb\u003eNumber of Pages: \u003c\/b\u003e194 pages\u003c\/li\u003e\n\u003cli\u003e• \u003cb\u003eLanguage: \u003c\/b\u003eEnglish\u003c\/li\u003e\n\u003cli\u003e• \u003cb\u003eBinding: \u003c\/b\u003ePaperback\u003c\/li\u003e\n\u003cli\u003e• \u003cb\u003eISBN-10: \u003c\/b\u003e1107408326\u003c\/li\u003e\n\u003cli\u003e• \u003cb\u003eISBN-13: \u003c\/b\u003e9781107408326\u003c\/li\u003e\n\u003c\/ul\u003e","brand":"Cambridge University Press","offers":[{"title":"Default Title","offer_id":49392903782705,"sku":"9781107408326","price":40.91,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0798\/8215\/8385\/files\/9781107408326_p0_v1_s600x595.jpg?v=1717287191","url":"https:\/\/www.recomparo.com\/products\/9781107408326","provider":"ReComparo.com","version":"1.0","type":"link"}