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Strain Effect In Semiconductors: Theory And Device Applications
Strain Effect In Semiconductors: Theory And Device Applications
ISBN-13: 9781489983152
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Strain Effect in Semiconductors: Theory and Device Applications presents the fundamentals and applications of strain in semiconductors and semiconductor devices that is relevant for strain-enhanced advanced CMOS technology and strain-based piezoresistive MEMS transducers. Discusses relevant applications of strain while also focusing on the fundamental physics pertaining to bulk, planar, and scaled nano-devices. Hence, this book is relevant for current strained Si logic technology as well as for understanding the physics and scaling for future strained nano-scale devices.
- • Author: Yongke Sun, Scott E. Thompson, Toshikazu Nishida
- • Publisher: Springer
- • Publication Date: Nov 20, 2014
- • Number of Pages: 362 pages
- • Language: English
- • Binding: Paperback
- • ISBN-10: 1489983155
- • ISBN-13: 9781489983152
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